- Ambient pressure
- Front-end modules
- Load ports/aligners
- Inspection stations
- Compact precision
- EFEM integration
Description
The SIASUN Blade-D156 Atmospheric Manipulator moves wafers (or wafer-like substrates) between front-end modules, load ports, aligners, inspection stations, and process tool interfaces at ambient pressure.
Positioned as a compact, precision transfer platform often part of an EFEM or integrated material handling cell.
The Blade-D156 serves semiconductor, inspection, and industrial atmospheric handling applications.
Contact for pricing and availability.
Features
Specs
| Model | Blade-D156 |
|---|---|
| Robot Type | Atmospheric manipulator |
| Target Use | EFEM, front-end handling |
| Brand | SIASUN |
Industries
Frequently Asked Questions
Contact us for current pricing, availability, and a tailored quote on the SIASUN Atmospheric Manipulator Blade D156.
The SIASUN Blade-D156 is a compact atmospheric manipulator for EFEM and front-end module integration. Precision wafer transfer at load ports, aligners, and inspection stations.
The SIASUN Atmospheric Manipulator Blade D156 is well suited to Industrial applications.
Yes. Robotix Market ships worldwide with full logistics support, customs handling, and after-sales assistance.
Yes. Robotix Market supplies businesses worldwide with invoicing and after-sales support. Contact us for a quote.
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